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Infrared and Laser Engineering, Volume. 45, Issue 10, 1017002(2016)

Study of displacement sensing technology of near-infrared microscopic interferometry in spectral domain

Zheng Quan1, Han Zhigang2, and Chen Lei1,2
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  • 1[in Chinese]
  • 2[in Chinese]
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    Zheng Quan, Han Zhigang, Chen Lei. Study of displacement sensing technology of near-infrared microscopic interferometry in spectral domain[J]. Infrared and Laser Engineering, 2016, 45(10): 1017002

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    Paper Information

    Category: 光电测量

    Received: Feb. 10, 2016

    Accepted: Mar. 27, 2016

    Published Online: Nov. 14, 2016

    The Author Email:

    DOI:10.3788/irla201645.1017002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology