Acta Photonica Sinica, Volume. 34, Issue 5, 737(2005)
Microregion Deformation Measurement of Thin Films Using Array Microindentation Mark Method
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Microregion Deformation Measurement of Thin Films Using Array Microindentation Mark Method[J]. Acta Photonica Sinica, 2005, 34(5): 737