Acta Photonica Sinica, Volume. 34, Issue 5, 737(2005)

Microregion Deformation Measurement of Thin Films Using Array Microindentation Mark Method

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Microregion Deformation Measurement of Thin Films Using Array Microindentation Mark Method[J]. Acta Photonica Sinica, 2005, 34(5): 737

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    Received: Feb. 27, 2004

    Accepted: --

    Published Online: Jun. 12, 2006

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