Research progress of laser-assisted chemical vapor deposition

Lisha Fan; Fan Liu; Guolong Wu; S. Kovalenko Volodymyr; Jianhua Yao

doi:10.12086/oee.2022.210333

Opto-Electronic Engineering, Volume. 49, Issue 2, 210333-1(2022)

Research progress of laser-assisted chemical vapor deposition

Lisha Fan1...2,3, Fan Liu1,2,3, Guolong Wu1,2,3, S. Kovalenko Volodymyr1,2,3,4, and Jianhua Yao1,23,* |Show fewer author(s)

Author Affiliations

¹Institute of Laser Advanced Manufacturing, Zhejiang University of Technology, Hangzhou, Zhejiang 310023, China

²College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, Zhejiang 310023, China

³Collaborative Innovation Center of High-End Laser Manufacturing Equipment (National 2011 Plan), Zhejiang University of Technology, Hangzhou, Zhejiang 310023, China

⁴Laser Technology Research Institute, National Technical University of Ukraine, Kiev 03056, Ukraine

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Lisha Fan, Fan Liu, Guolong Wu, S. Kovalenko Volodymyr, Jianhua Yao. Research progress of laser-assisted chemical vapor deposition[J]. Opto-Electronic Engineering, 2022, 49(2): 210333-1

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Paper Information

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Received: Oct. 20, 2021

Accepted: --

Published Online: Apr. 6, 2022

The Author Email: Yao Jianhua (laser@zjut.edu.cn)

DOI:10.12086/oee.2022.210333

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

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