Fig. 1. Different relaxation channels for energy transfer during binary collisions of molecules^[79]

Fig. 2. Commonly used experimental setup for pyrolysis LCVD

Fig. 3. (a) Plot of three regimes for incubation, nucleation and coalescence of W deposited at 2.44 W; (b) Thickness of W films deposited on glass substrates plotted as a function of deposition time; (c) Surface morphology of deposited W films deposited at different laser power^[81]

Fig. 4. SEM images of diamond grown on tungsten surface of (a) poorly and (b) heavily nucleated^[96]

Fig. 5. (a) XRD patterns of the β-SiC films prepared at different laser power, deposition pressure and deposition temperature; (b) Effects of laser power and deposition pressure on preferred crystalline orientations of β-SiC films^[97]

Fig. 6. (a) Surface and (b) cross-sectional SEM images of HfO₂ films prepared using conventional CVD at 1173 K, (c), (e) surface and the corresponding (d), (f) cross-sectional SEM images of (c), (d) HfO₂ films prepared at 1203 K and (e), (f) HfO₂ films prepared at 1383 K by pyrolysis CVD, effect of deposition temperature on deposition rate, crystallite size, and morphological evolution in HfO₂ films prepared using (g) conventional CVD and (h) pyrolysis CVD^[71]

Fig. 7. Surface and cross‐sectional SEM images of the SrTiO₃ films prepared at 760 K (a, b) , 957 K (c, d) and 1104 K (e, f) with a laser power of 150 W, respectively; (g) Influences of the deposition temperature on thickness, grains size, grains shape, and preferred orientation of the SrTiO₃ films^[128]

Fig. 8. (a), (b) TEM observations and (c) atomic configuration of the nanoforest-like 3C-SiC/graphene composite films deposited at 1523 K and 400 Pa, (d) schematic illustration and (e) cycling performance of 3C-SiC/graphene nanoforest composite films with stable framework and continuous electron pathways^[136]

Fig. 9. Commonly used experimental setup and principle of photolysis LCVD

Fig. 10. SEM photographs and corresponding 3D images of the deposited tungsten patterns for various laser power. (a) 0.21 mW; (b) 0.249 mW; (c) 0.468 mW; (d) 0.607 mW; (e) Variation of electrical resistivity of the deposit tungsten with respect to laser power; (f) Example of the tungsten interconnect deposited by LCVD for thin film transistor-liquid crystal display circuit repair^[150]

Fig. 11. (a) Surface and cross-sectional SEM images of diamond films prepared at different laser energy densities; 　　　　　(b) The reaction process diagram of active species in the combustion flame under the ultraviolet light irradiation^[61]

Fig. 12. Surface image surface and cross-sectional SEM images of TiN_x films prepared at T_pre = 423 K with varied laser power. (a) P_L =50 W; (b) P_L =100 W; (c) P_L =150 W; (d) P_L =200 W, effects of T_pre and P_L on (e) the deposition rate and (f) the deposition temperature of TiN_x films^[170]

Fig. 13. Si₃N₄ film prepared by LVCD. (a) Precursor gas ratio and (b) RF power with different laser photolysis condition ^[176]

Fig. 14. Commonly used experimental setup for laser resonant excitation LCVD

Fig. 15. The influence of laser resonant excitation on CVD of carbon nano-onions. (a)~(c) Photographs of ethylene–oxygen flames; (d)~(f) High-resolution TEM images of CNOs, showing their atomic-level microstructure; (g), (h) Raman spectra and its fitting curve of CNOs^[180]

Fig. 16. BDD prepared using resonant excitation LCVD method and their electrochemical performance in glucose tests. (a) SEM images of BDD films prepared at different laser power; (b) Schematic illustration of glucose detection setup; (c) CV scans; (d) Ampere scanning; (e) Potential window; (f) Nyquist plots^[43]

Fig. 17. (a, b) Cross-sectional SEM images of GaN films and (c, d) XRD patterns of GaN grown at different temperature in LMOCVD and conventional MOCVD process, respectively^[54]

Fig. 18. (a) Experimental setup for the CO₂ laser-assisted CCVD and (b) optical emission spectra and (c) mole fractions of the species of NH₃/C₂H₂/O₂ flames under different laser excitations measured using mass spectrometer^[181]; (d) Optical images of C₂H₄/C₂H₂/O₂ flames^[184]