[1] [1] ZHANG P Y,WU G Y,HAO Y L,et al..Development of microgripper technology[J].Opt.Precision Eng.,2000,8(3):292-296.(in Chinese)

[2] [2] LI Y,LI Y H,LI Q X.Fabrication process analysis for electrostatically actuated microgripper based on silicon bulk micromachining [J].Opt.Precision Eng.,2003,11(2):109-113.(in Chinese)

[3] [3] YIN Y L,ZHU B T,CHEN H Y,et al..Design and operational properties of a manipulator for minimeter-size microrobot [J].Opt.Precision Eng.,2001,9(6):531-534.(in Chinese)

[4] [4] MENCIASSI A,EISINBERG A,IZZO I.From “Macro” to “Micro” manipulation:models and experiments[J].IEEE/ASME Transactions on Mechtronics,2004,7(2):311-314.

[5] [5] SINAN HALIY O D,REGNIER S,JEAN-CLAUDE GUINOT.MAD,the adhesion based dynamic micro-manipulator[J].European Journal of Mechanics A/Solids,2003,10(22):903-916.

[6] [6] KIM CH J,PISANO A P, MULLER R S,et al..Polysilicon microgripper[J].Sensors and Actuators,1992,11(33):221-227.

[7] [7] WANG J CH,RONG W B,SUN L N,et al..Development on a micro-gripper integrating force sensor based on the MEMS technology[J].Opt.Precision Eng.,2008,16(4):636-641.(in Chinese)