Optics and Precision Engineering, Volume. 17, Issue 8, 1928(2009)
Development of hybrid-type MEMS microgripper
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CHEN Li-guo, LIU Bai-xu. Development of hybrid-type MEMS microgripper[J]. Optics and Precision Engineering, 2009, 17(8): 1928
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Received: Jan. 19, 2009
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: Li-guo CHEN (clg@hit.edu.cn)
CSTR:32186.14.
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