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Journal of the Chinese Ceramic Society, Volume. 52, Issue 5, 1761(2024)

Research Progress of Hydride Vapor Phase Epitaxy Technology for AlN Single Crystal

ZHANG Dian1... ZHU Rongxin1, YANG Xiaofeng1 and LIU Yijun2 |Show fewer author(s)
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    ZHANG Dian, ZHU Rongxin, YANG Xiaofeng, LIU Yijun. Research Progress of Hydride Vapor Phase Epitaxy Technology for AlN Single Crystal[J]. Journal of the Chinese Ceramic Society, 2024, 52(5): 1761

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    Received: Sep. 14, 2023

    Accepted: --

    Published Online: Aug. 20, 2024

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    DOI:10.14062/j.issn.0454-5648.20230714

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology