Fig. 1. View of MEMS biomaterial assembly

Fig. 2. The calculated displacement of chip deformation

Fig. 3. Piezoresistor coordinate and integration path

Fig. 4. View of packaging of MEMS micromirror and micromirror in details

Fig. 5. Fabrication process of the proposed micromirror

Fig. 6. Photographs of the fabricated MEMS mirror chip

Fig. 7. Test setup

Fig. 8. Output of piezoresistive angle sensor