Journal of Semiconductors, Volume. 44, Issue 8, 082802(2023)

Analytical model of non-uniform charge distribution within the gated region of GaN HEMTs

Amgad A. Al-Saman1,2, Eugeny A. Ryndin3, Xinchuan Zhang2, Yi Pei2、*, and Fujiang Lin1、**
Author Affiliations
  • 1School of Microelectronics, University of Science and Technology of China, Hefei 230026, China
  • 2Dynax Semiconductor Inc., Suzhou 215300, China
  • 3Department of Micro- and Nanoelectronics, Saint Petersburg Electrotechnical University, Saint Petersburg 197376, Russia
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    Figures & Tables(5)
    (Color online) Cross-section of considered GaN/AlGaN HEMT transistor.
    (Color online) The Electron concentration distribution within the gated region of GaN HEMT at Vg = 1 V and swept Vd from 0 to 5 V. In the figure, x denotes the distance along the channel.
    (Color online) Electron concentration distribution within the gated region of GaN HEMT at Vg = 0 V and swept Vd from 0 to 5 V. In the figure, x denotes the distance along the channel.
    (Color online) Electron concentration distribution within the gated region of GaN HEMT at Vg = –1 V and swept Vd from 0 to 5 V. In figure, x denotes the distance along the channel.
    • Table 1. Geometrical and simulation parameters of considered GaN/AlGaN HEMT transistor.

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      Table 1. Geometrical and simulation parameters of considered GaN/AlGaN HEMT transistor.

      ParameterSymbleValueParameterSymbleValue
      Threshold voltageVoff–2.1 VMobilityµ2000 cm2/(V·s)
      Gate lengthLg0.1 µmSaturation velocityvs2.9 × 105 m/s
      Gate widthWg4 × 30 µmExp. parameterγ12.12 × 10–12
      Barrier thicknessd30 nmExp. parameterγ23.73 × 10–12
      Channel thiknessWch1 µmControlling parametersη1, η20.5 × 10-2
      Substrate thicknessWs100 µmControlling parametera11
      AlGaN dielectric consε10.66 × 10–11 F/mControlling parametera25
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    Amgad A. Al-Saman, Eugeny A. Ryndin, Xinchuan Zhang, Yi Pei, Fujiang Lin. Analytical model of non-uniform charge distribution within the gated region of GaN HEMTs[J]. Journal of Semiconductors, 2023, 44(8): 082802

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    Paper Information

    Category: Articles

    Received: Oct. 31, 2022

    Accepted: --

    Published Online: Sep. 21, 2023

    The Author Email: Pei Yi (yi.pei@dynax-semi.com), Lin Fujiang (linfj@ustc.edu.cn)

    DOI:10.1088/1674-4926/44/8/082802

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