Acta Optica Sinica, Volume. 25, Issue 7, 923(2005)

Study on the Autofocus Evaluation Function in Ellipsometric Imaging System

[in Chinese]*, [in Chinese], and [in Chinese]
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    CLP Journals

    [1] Liu Xuechao, Wu Zhiyong, Huang Detian, Liang Minhua. Designing of Focus Window Combined with Visual Perception[J]. Chinese Journal of Lasers, 2014, 41(1): 109001

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    [in Chinese], [in Chinese], [in Chinese]. Study on the Autofocus Evaluation Function in Ellipsometric Imaging System[J]. Acta Optica Sinica, 2005, 25(7): 923

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 28, 2004

    Accepted: --

    Published Online: May. 22, 2006

    The Author Email: (schen@imech.ac.cn)

    DOI:

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