Acta Optica Sinica, Volume. 25, Issue 7, 923(2005)
Study on the Autofocus Evaluation Function in Ellipsometric Imaging System
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[in Chinese], [in Chinese], [in Chinese]. Study on the Autofocus Evaluation Function in Ellipsometric Imaging System[J]. Acta Optica Sinica, 2005, 25(7): 923