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Optics and Precision Engineering, Volume. 24, Issue 4, 740(2016)

Optical design of high-numerical aperture lithographic lenses

XU Ming-fei1...2,*, PANG Wu-bin1, XU Xiang-ru1,2, WANG Xin-hua1 and HUANG Wei1 |Show fewer author(s)
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  • 2[in Chinese]
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    XU Ming-fei, PANG Wu-bin, XU Xiang-ru, WANG Xin-hua, HUANG Wei. Optical design of high-numerical aperture lithographic lenses[J]. Optics and Precision Engineering, 2016, 24(4): 740

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    Received: Apr. 29, 2015

    Accepted: --

    Published Online: Jun. 6, 2016

    The Author Email: Ming-fei XU (stone870914@163.com)

    DOI:10.3788/ope.20162404.0740

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology