Infrared and Laser Engineering, Volume. 50, Issue 10, 20200489(2021)

Influence of indium composition of n waveguide layer on photoelectric performance of GaN-based green laser diode

Tiantian Jia1... Hailiang Dong1, Zhigang Jia1, Aiqin Zhang2, Jian Liang3, and Bingshe Xu14 |Show fewer author(s)
Author Affiliations
  • 1Key Laboratory of Interface Science and Engineering in Advanced Materials Ministry of Education, Taiyuan University of Technology, Taiyuan 030024, China
  • 2College of Textile Engineering, Taiyuan University of Technology, Taiyuan 030024, China
  • 3College of Materials Science and Engineering, Taiyuan University of Technology, Taiyuan 030024, China
  • 4Institute of Atomic and Molecular Science, Shaanxi University of Science & Technology, Xi’an 710021, China
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    Figures & Tables(11)
    Epitaxial structure of the InGaN-based green laser diode
    Refractive index of InxGa1-xN with x composition 0.04-0.08 at the wavelength of 525 nm
    Refractive index profiles and intensity distributions of TE-modes versus the different n-InxGa1−xN waveguide indium content ((b) is the magnification of (a) from 550 nm to 1050 nm)
    Optical loss outside multiple quantum wells ( αout) (a), optical loss in multiple quantum wells (αQW) (b) and total optical loss (αTotal) (c) of laser diode versus the injected current for different n-InxGa1−xN waveguide indium content (The arrow indicates 0.5 A or 6 kA/cm2)
    Leakage current density (a), injection efficiency (b) and IQE (c) of laser diode versus the injected current for different n-InxGa1−xN waveguide indium content
    Band energy versus of different n-InxGa1−xN waveguide indium contents at injection current 0.5 A (Injection density is 6 kA/cm2)
    [in Chinese]
    Curves of nonradiative current density (a), SRH current density (b), Auger current density (c) and active region carrier concentration (d) versus injected current at different indium components of n-InxGa1−xN waveguide layers
    Threshold current (a) and voltage (b) of laser diode with n-InxGa1−xN waveguide indium contents versus injected current
    Simulated power (a) and conversion efficiency (b) of laser diode with n-InxGa1−xN waveguide indium contents versus injected current
    • Table 1. Structural parameters of InGaN-based green laser diode

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      Table 1. Structural parameters of InGaN-based green laser diode

      NameThicknessConcentration /cm−3Mobility /cm2V−1s−1
      p-Contact layer100 nm p-GaN1×1020200/20
      p-Cladding layer (CL)500 nm p-Al0.12In0.01Ga0.87N 1×1020200/20
      p- Waveguide layer (WG) 70 nm p-In0.04Ga0.96N 2×1019200/20
      Electron blocking layer (EBL) 14nm p-Al0.18In0.01Ga0.81N 5×1018200/20
      Quantum well (QW)/ Quantum barrier (QB) (×2) 3.5 nm In0.29Ga0.71N/11 nm Al0.05In0.01Ga0.94N 0/6×10183000/30/ 200/20
      QW3.5 nm In0.29Ga0.71N 03000/30
      n-WG47.5 nm InxGa1-xN 5×1018200/20
      n-WG100 nm n-GaN5×1018200/20
      n-CL550 nm n-Al0..09In0.01Ga0.9N 6×1018200/20
      n-Contact layer100 nm n-GaN6×1018200/20
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    Tiantian Jia, Hailiang Dong, Zhigang Jia, Aiqin Zhang, Jian Liang, Bingshe Xu. Influence of indium composition of n waveguide layer on photoelectric performance of GaN-based green laser diode[J]. Infrared and Laser Engineering, 2021, 50(10): 20200489

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    Paper Information

    Category: Lasers & Laser optics

    Received: Nov. 18, 2020

    Accepted: --

    Published Online: Dec. 7, 2021

    The Author Email:

    DOI:10.3788/IRLA20200489

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