Journal of Synthetic Crystals, Volume. 52, Issue 9, 1570(2023)

Study on the Influence of Miscut-Angle on the Processing of β-Ga2O3(100) Plane Substrate

LI Xinru1,*... HOU Tong1, MA Xu1, WANG Pei1, LI Yang1, MU Wenxiang1, JIA Zhitai1,2 and TAO Xutang1 |Show fewer author(s)
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    LI Xinru, HOU Tong, MA Xu, WANG Pei, LI Yang, MU Wenxiang, JIA Zhitai, TAO Xutang. Study on the Influence of Miscut-Angle on the Processing of β-Ga2O3(100) Plane Substrate[J]. Journal of Synthetic Crystals, 2023, 52(9): 1570

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    Paper Information

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    Received: Mar. 27, 2023

    Accepted: --

    Published Online: Oct. 7, 2023

    The Author Email: Xinru LI (1052965637@qq.com)

    DOI:

    CSTR:32186.14.

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