Optics and Precision Engineering, Volume. 31, Issue 2, 183(2023)

Research and development status of Mini/Micro LED mass transfer technology

Wei WANG1... Tiantian ZHAO1, Qiang LIU1,2,*, Bangcheng HAN3, Pingjuan NIU2 and Jian SANG4 |Show fewer author(s)
Author Affiliations
  • 1Institute of Precision Electromagnetic Equipment and Advanced Measurement Technology, Beijing Institute of Petrochemical Technology, Beijing0267, China
  • 2School of Electronic and Information Engineering, Tiangong University, Tianjin300387, China
  • 3Key Laboratory of Inertial Technology, Beihang University, Beijing100191, China
  • 4Guangzhou Hongli Opto-Electronic Co., Ltd., Guangzhou510890, China
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    Figures & Tables(20)
    Micro transfer-printing
    Schematic of electromagnetic force transfer[27-28]
    Schematic of swing-arm transfer[29]
    Schematic of needle pricking transfer[32]
    Schematic of electrostatic transfer[35-36]
    Fluid self-assembly technology
    Magnetic self-assembly technology
    Roll transfer technology
    Laser direct lift-off scheme
    Laser indirect lift-off scheme
    Mini LED transfer machine
    Micro LED transfer machine
    Vacuum preloaded air supported configuration MPP
    Magnetic preloaded air supported configuration MPP[65]
    Magnetic resistance magnetic levitated MPP
    Lorentz magnetic levitated MPP
    Magnetically levitated MPP with magnetic resistance and Lorentz force[75]
    Hybrid configuration MPP combining the air surported and magnetic tracks
    Protocrystal films based on liquid-gas bimodal media
    Hybrid configuration MPP combining the mechanical and magnetic tracks[79]
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    Wei WANG, Tiantian ZHAO, Qiang LIU, Bangcheng HAN, Pingjuan NIU, Jian SANG. Research and development status of Mini/Micro LED mass transfer technology[J]. Optics and Precision Engineering, 2023, 31(2): 183

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Jun. 7, 2022

    Accepted: --

    Published Online: Feb. 9, 2023

    The Author Email: LIU Qiang (Liuqiangbuaa@163.com)

    DOI:10.37188/OPE.20233102.0183

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