Optics and Precision Engineering, Volume. 31, Issue 2, 183(2023)

Research and development status of Mini/Micro LED mass transfer technology

Wei WANG1... Tiantian ZHAO1, Qiang LIU1,2,*, Bangcheng HAN3, Pingjuan NIU2 and Jian SANG4 |Show fewer author(s)
Author Affiliations
  • 1Institute of Precision Electromagnetic Equipment and Advanced Measurement Technology, Beijing Institute of Petrochemical Technology, Beijing0267, China
  • 2School of Electronic and Information Engineering, Tiangong University, Tianjin300387, China
  • 3Key Laboratory of Inertial Technology, Beihang University, Beijing100191, China
  • 4Guangzhou Hongli Opto-Electronic Co., Ltd., Guangzhou510890, China
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    This paper expounds the current research and future development of Mass Transfer (MT) and Motion Positioning Platform (MPP) technology. On the basis of the chip transfer method, the MT scheme can be divided into precision pick-and-release, self-assembly, roller-transfer, and laser lift-off technology. The development process of the MT scheme is discussed based on the chip transfer efficiency and yield. On this basis, the structures and working principles of mechanical, air-supported, magnetic levitation, and hybrid configurations are introduced. Considering the aspects such as motion stroke and positioning accuracy, the advantages and disadvantages of MPPs are discussed. Finally, the development prospects of MT and MPP devices are predicted. Laser lift-off technology based on microporous liquid-gas bimodal media and hybrid-configuration MPP that combines mechanical and magnetic tracks with circumferential small-angle correction and axial micro-height-adjustment capabilities are expected to form the focus of the research on Mini/Micro LED chip-transfer technology.

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    Wei WANG, Tiantian ZHAO, Qiang LIU, Bangcheng HAN, Pingjuan NIU, Jian SANG. Research and development status of Mini/Micro LED mass transfer technology[J]. Optics and Precision Engineering, 2023, 31(2): 183

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Jun. 7, 2022

    Accepted: --

    Published Online: Feb. 9, 2023

    The Author Email: LIU Qiang (Liuqiangbuaa@163.com)

    DOI:10.37188/OPE.20233102.0183

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