Optics and Precision Engineering, Volume. 18, Issue 3, 670(2010)

Fabrication of ultra-high metal micro electrode array using UV-LIGA technology

HU Yang-yang*... ZHU Di, LI Han-song, QU Ning-song, ZENG Yong-bin and MING Ping-mei |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    References(12)

    [1] [1] TAKAHATA K, GIANCHANDANI Y B.Batch mode micro-electro-discharge machining[J].Microelectromech.Syst, 2002,11:102-110.

    [2] [2] TIMOTHY A F, SYLVAIN M M, NICHOLAS G H, et al..Microelectrode array fabrication by electrical discharge machining and chemical etching[J].IEEE Transactions on Biomedicalengineering, 2004,51(6):890-895.

    [3] [3] WENG H M, WANG ZH L.Research on micro square array electrodes and holes combination process by EDM and ECM [J].Electromachining & Mould, 2007,5:5-8.(in Chinese)

    [4] [4] ZENG W L, WANG ZHEN L.Application of micro-electrode array and its machining encapsulation technology [J].Electromachining & Mould, 2007,1:6-9.(in Chinese)

    [6] [6] ZHANG J, TAN K L, HONG G D, et al..Polymerization optimization of SU-8 PR and its applications in microfluidic systems and MEMS[J].J.Micromech.Microeng.2001,11:20-26.

    [7] [7] LORENZ H,DESPONT M,LABIANCA N.SU-8:a low-cost negative resist for MEMS[J].J.Micromech.Microeng.1997,7:121-124.

    [9] [9] CUI F, JING X M, ZHAO X L, et al..Techniques for remove of SU-8 photoresist mold [J].Microfabrication Technology, 2007,1:1-6.(in Chinese)

    [10] [10] GHANTASALA M K, HAYES J P, HARVEY E C, et al..Patterning, electroplating and removal of SU-8 moulds by excimer laser micromachining[J].J.Micromech.Microeng, 2001,11:133-139.

    [11] [11] HO C H,CHIN K P, YANG C R, et al..Ultrathick SU-8 mold formation and removal, and its application to the fabrication of LIGA-like micromotors with embedded roots[J].Sensors and Actuators A, 2002,102:130-138.

    CLP Journals

    [1] XU Bin, WU Xiao-yu, LEI Jian-guo, LUO Feng, GONG Feng, DU Chen-lin, RUAN Shuang-chen, WANG Zhen-long. Fabrication of 3D microstructure with layer-by-layer micro-electric resistance slip welding[J]. Optics and Precision Engineering, 2014, 22(5): 1251

    [2] DU Li-qun, LI Cheng-bin, LI Yong-hui, YU Tong-min. Application of ultrasonic stress relief technology to microinjection mold fabrication[J]. Optics and Precision Engineering, 2012, 20(6): 1250

    [3] ZHANG Zhao-yang, LI Zhong-yang, WANG Yao-min, MAO Wei-ping. Mechanical-electrochemical micro-etching under laser shock effect[J]. Optics and Precision Engineering, 2012, 20(6): 1310

    [4] XU Bin, WU Xiao-yu, LING Shi-quan, WU Shi-yun, LUO Feng, DU Chen-lin, SUN Xiu-quan. Fabrication of 3D metal micro-structure based on fs laser cutting and micro electric resistance slip welding[J]. Optics and Precision Engineering, 2012, 20(8): 1811

    Tools

    Get Citation

    Copy Citation Text

    HU Yang-yang, ZHU Di, LI Han-song, QU Ning-song, ZENG Yong-bin, MING Ping-mei. Fabrication of ultra-high metal micro electrode array using UV-LIGA technology[J]. Optics and Precision Engineering, 2010, 18(3): 670

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Oct. 10, 2009

    Accepted: --

    Published Online: Aug. 31, 2010

    The Author Email: Yang-yang HU (hyy502@nuaa.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics