Optics and Precision Engineering, Volume. 18, Issue 3, 670(2010)
Fabrication of ultra-high metal micro electrode array using UV-LIGA technology
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HU Yang-yang, ZHU Di, LI Han-song, QU Ning-song, ZENG Yong-bin, MING Ping-mei. Fabrication of ultra-high metal micro electrode array using UV-LIGA technology[J]. Optics and Precision Engineering, 2010, 18(3): 670
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Received: Oct. 10, 2009
Accepted: --
Published Online: Aug. 31, 2010
The Author Email: Yang-yang HU (hyy502@nuaa.edu.cn)
CSTR:32186.14.
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