Acta Optica Sinica, Volume. 41, Issue 5, 0522001(2021)

Optical Design of Deep Ultraviolet Laser Irradiation System for Accelerating Material Aging

Yang Zhao, Yang Xiang*, and Tingting Li
Author Affiliations
  • School of Photoelectric Engineering, Changchun University of Science and Technology, Changchun, Jilin 130022, China
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    Figures & Tables(12)
    Shaping process of aspheric cylindrical lens in vertical direction
    Schematic of afocal zoom system. (a) Focal fixation system; (b) zoom system
    System for accelerating material aging by laser irradiation. (a) Beam shaping system; (b) variable bunching system; (c) test lens
    Shaping effect of Gaussian beam in vertical direction
    Beam uniformity at different positions of distance shaping system
    Illumination distribution before and after beam shaping. (a) Before shaping; (b) after shaping
    Structure diagram of variable magnification and reduction beam system
    Light traces of variable magnification and reduction beam system under different magnifications. (a) 0.2×; (b) 0.3×; (c) 0.4×; (d) 0.5×
    Wave aberration of variable magnification and reduction beam system under different magnifications. (a) 0.2×; (b) 0.3×; (c) 0.4×; (d) 0.5×
    • Table 1. System parameters

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      Table 1. System parameters

      ParameterValue
      Wavelength /nm248
      Spot size /(mm×mm)20×20
      Working distance /mm500
      Horizontal divergence angle /mrad1.19
      Vertical divergence angle /mrad0.11
    • Table 2. Optical parameters of aspheric cylindrical lens

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      Table 2. Optical parameters of aspheric cylindrical lens

      ParameterAspheric 1Aspheric 2
      [-1/c(r)]/mm35.78568.600
      k5.213-6.469
      A4-1.9821×10-6-1.3753×10-5
      A62.3778×10-61.4538×10-7
      A8-2.4023×10-8-5.0634×10-9
      A101.2003×10-105.7809×10-11
      A12-2.3512×10-13-2.2945×10-13
    • Table 3. Tolerance parameters of optical system

      View table

      Table 3. Tolerance parameters of optical system

      Thickness /mmAperturenumberDecentration /mmTilt /(°)
      ±0.05±2±0.05±0.1
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    Yang Zhao, Yang Xiang, Tingting Li. Optical Design of Deep Ultraviolet Laser Irradiation System for Accelerating Material Aging[J]. Acta Optica Sinica, 2021, 41(5): 0522001

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Jul. 20, 2020

    Accepted: Oct. 12, 2020

    Published Online: Apr. 7, 2021

    The Author Email: Xiang Yang (xyciom@163.com)

    DOI:10.3788/AOS202141.0522001

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