In order to study the service life of multiple fused silica lenses in the deep ultraviolet lithography system, based on the theory of laser beam spatial shaping and the principle of afocal zoom, a set of multi-lens irradiation accelerated material aging system that meets the actual working conditions is designed. The aspheric cylindrical lens group is used to shape the beam whose light intensity distribution in the vertical direction is approximately Gaussian distribution, and then the beam spot size is reduced by the variable magnification beam reduction system to increase the energy density. The maximum uniformity of the beam spot in the vertical direction of the reshaped system is 96.8%, the beam shrinkage ratio is between 0.2 and 0.5, the maximum root mean square value of wave aberration is 0.1778λ, which is all less than λ/4, and the energy density is increased by 4--25 times. The system can simulate actual working conditions and meet the irradiation acceleration requirements of multiple lenses, thereby solving the problems of long experimental cycles and high cost in current tests.