Fig. 1. Ragone plots of microcapacitors and other energy storage devices^［6］

Fig. 2. Production processes and schematic diagram of aluminum and tantalum electrolytic capacitors

Fig. 3. Production processes and schematic diagram of film capacitor and multilayer ceramic capacitor

Fig. 4. Schematic diagram of MIM and MIS capacitors

Fig. 5. Schematic diagram of 3D microcapacitors based on MIM and MIS structures

Fig. 6. Schematic diagram of electric double layer of supercapacitor under external electric field

Fig. 7. Schematic diagram of method for integrating micro-supercapacitors^［36］

Fig. 8. Main preparation process of 3D silicon-based capacitors^［23］

Fig. 9. Micromorphology and film thickness preparation of medium thin films^［23］

Fig. 10. Graphene-based supercapacitors prepared on Si substrate and SiC substrate respectively^［48-49］