Journal of Applied Optics, Volume. 43, Issue 5, 950(2022)

Optimal compensation methods of wedge angle of reference mirror in equal optical path interferometers

Huaikang ZHU1...1, Qiyuan ZHANG1,1, and Sen HAN1,1,1,1,11,* |Show fewer author(s)
Author Affiliations
  • 11School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 12Suzhou H&L Instruments LLC., Suzhou 215123, China
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    Huaikang ZHU, Qiyuan ZHANG, Sen HAN. Optimal compensation methods of wedge angle of reference mirror in equal optical path interferometers[J]. Journal of Applied Optics, 2022, 43(5): 950

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    Paper Information

    Category: OPTICAL METROLOGY AND MEASUREMENT

    Received: Mar. 4, 2022

    Accepted: --

    Published Online: Oct. 12, 2022

    The Author Email: HAN Sen (senhanemail@126.com)

    DOI:10.5768/JAO202243.0503004

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