Fig. 1. Schematic diagram of Fizeau interferometer

Fig. 2. Optical path diagram of equal optical path

Fig. 3. Schematic of equal optical path interferometer

Fig. 4. Reference mirror with wedge angle and beam splitter mirror without wedge angle

Fig. 5. Reference mirror with wedge angle 1 and beam splitter mirror without wedge angle

Fig. 6. Reference mirror with wedge angle and beam splitter mirror with wedge angle

Fig. 7. Reference mirror with wedge angle and front of beam splitter mirror with wedge angle

Fig. 8. Layout diagram of optical structure of illumination system

Fig. 9. Spot diagram of light source passing through illumination system

Fig. 10. Layout diagram of optical structure of collimating system

Fig. 11. Spot diagram of collimating system

Fig. 12. MTF diagram of collimating system

Fig. 13. Layout of interferometer collimating system and imaging system

Fig. 14. Spot diagram of optical system

Fig. 15. Distortion of optical system

Fig. 16. Layout diagram of overall system

Fig. 17. Interferogram of tested beam and reference beam

Fig. 18. Tilted angle versus PV value

Fig. 19. Compensation for inclination angle of beam splitter mirror and inclination angle of measured surface versus PV value

Fig. 20. Compensation for wedge angle of beam splitter mirror and inclination angle of measured surface versus PV value

Fig. 21. Compensation for inclination angle and wedge angle of beam splitter mirror versus PV value

Fig. 22. Different compensation methods of same inclination angle versus PV value