Microelectronics, Volume. 52, Issue 6, 1076(2022)

Study on Total Ionizing Dose Effect of 22 nm Bulk Silicon nFinFET

CUI Xu1...2,3, CUI Jiangwei1,2,3, ZHENG Qiwen1,2,3, WEI Ying1,2,3, LI Yudong1,2,3, and GUO Qi1,23 |Show fewer author(s)
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    References(16)

    [1] [1] ZHAO S E, BONALDO S, WANG P, et al. Gate bias and length dependences of total ionizing dose effects in InGaAs FinFETs on bulk Si [J]. IEEE Trans Nucl Sci, 2019, 66(7): 1599-1605.

    [2] [2] ZHAO S E, BONALDO S, WANG P, et al.Total-ionizing-dose effects on InGaAs FinFETs with modified gate-stack [J]. IEEE Trans Nucl Sci, 2020, 67(1): 253-259.

    [3] [3] CHATTERJEE I, ZHANG E X, BHUVA B L, et al. Geometry dependence of total-dose effects in bulk FinFETs [J]. IEEE Trans Nucl Sci, 2014, 61(6): 2951-2958.

    [5] [5] KING M P, WU X, ELLER M, et al. Analysis of TID process, geometry, and bias condition dependence in 14-nm FinFETs and implications for RF and SRAM performance [J]. IEEE Trans Nucl Sci, 2017, 64(1): 285-292.

    [6] [6] WANG B, CUI J, GUO Q, et al. The influence of total ionizing dose on the hot carrier injection of 22 nm bulk nFinFET [J]. J Semicond, 2020, 41(12): 11-15.

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    [8] [8] ASTM F996-11, standard test method for separating an ionizing radiation-induced MOSFET threshold voltage shift into components due to oxide trapped holes and interface states using the subthreshold current-voltage characteristics [S]. ASTM International, 2011.

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    [13] [13] CHATZIKYRIAKOU E, POTTER K, REDMAN- WHITE W, et al. Three-dimensional finite elements method simulation of total ionizing dose in 22 nm bulk nFinFETs [J]. Nucl Instrum Methods Phys Res, Sect B, 2017, 393: 39-43.

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    [17] [17] YANG L, ZHANG Q, HUANG Y, et al. Total ionizing dose response and annealing behavior of bulk nFinFETs with on-state bias irradiation [J]. IEEE Trans Nucl Sci, 2018, 65(8): 1503-1510.

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    CUI Xu, CUI Jiangwei, ZHENG Qiwen, WEI Ying, LI Yudong, GUO Qi. Study on Total Ionizing Dose Effect of 22 nm Bulk Silicon nFinFET[J]. Microelectronics, 2022, 52(6): 1076

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    Paper Information

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    Received: Nov. 30, 2021

    Accepted: --

    Published Online: Mar. 11, 2023

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.210465

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