Optics and Precision Engineering, Volume. 23, Issue 1, 132(2015)
Three degrees of freedom modeling and adaptive neural network control for long-stroke wafer stage
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WANG Yi-guang, CHEN Xing-lin, LI Xiao-jie. Three degrees of freedom modeling and adaptive neural network control for long-stroke wafer stage[J]. Optics and Precision Engineering, 2015, 23(1): 132
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Received: May. 4, 2014
Accepted: --
Published Online: Feb. 15, 2015
The Author Email: Yi-guang WANG (yiguangwang@yahoo.com)
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