Piezoelectrics & Acoustooptics, Volume. 42, Issue 5, 628(2020)

Preparation and Application of Composite AlN Piezoelectric Films

CHEN Yunxiang... ZHAO Xuemei, ZHENG Zeyu, TAO Yi, WU Ping, TIAN Yarui, ZHANG Yongchuan and XU Donghui |Show fewer author(s)
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    References(5)

    [1] [1] FUJII S.High-frequency surface acoustic wave filter based on diamond thin film[J].Physica Status Solidi (A), 2011,28(5):1072-1077.

    [2] [2] RODRíGUEZ-MADRID J G, IRIARTE G F, ARAUJO D,et al. Optimization of AlN thin layers on diamond substrates for high frequency SAW resonators[J].Materials Letters,2012,66(1):339-342.

    [3] [3] MEINSCHIEN J, BEHME G, FALK F, et al. Smooth and oriented AlN thin films deposited by laser ablation and their application for SAW devices[J]. Applied Physics A: Materials Science & Processing, 2000, 70(2):215-218.

    [4] [4] LIU J M,CHONG N,CHAN H LW, et al. Pulsed-laser- deposited epitaxial aluminum nitride films on (111) Si for surface acoustic-wave applications[J].Applied Physics A: Materials Science & Processing, 2003, 76(1):93-96.

    [5] [5] Goh Y W , LU Y F, REN Z M, et al. Influence of substrate temperature and ion-beam energy on the syntheses of aluminium nitride thin films by nitrogen-ion-assisted pulsed-laser deposition[J].Applied Physics A:Materials Science & Processing,2003,77(3/4):433-439.

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    CHEN Yunxiang, ZHAO Xuemei, ZHENG Zeyu, TAO Yi, WU Ping, TIAN Yarui, ZHANG Yongchuan, XU Donghui. Preparation and Application of Composite AlN Piezoelectric Films[J]. Piezoelectrics & Acoustooptics, 2020, 42(5): 628

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    Paper Information

    Received: Sep. 2, 2020

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2020.05.010

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