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Piezoelectrics & Acoustooptics, Volume. 42, Issue 5, 628(2020)

Preparation and Application of Composite AlN Piezoelectric Films

CHEN Yunxiang... ZHAO Xuemei, ZHENG Zeyu, TAO Yi, WU Ping, TIAN Yarui, ZHANG Yongchuan and XU Donghui |Show fewer author(s)
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    CHEN Yunxiang, ZHAO Xuemei, ZHENG Zeyu, TAO Yi, WU Ping, TIAN Yarui, ZHANG Yongchuan, XU Donghui. Preparation and Application of Composite AlN Piezoelectric Films[J]. Piezoelectrics & Acoustooptics, 2020, 42(5): 628

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    Paper Information

    Received: Sep. 2, 2020

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2020.05.010

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology