[1] [1] Robertson I D, Lucyszyn S. RFIC MMIC design technology[M]. London: Institution of Electrical Engineers, 2001: 15.

[2] [2] Chang K, Bahl I J, Nair V. RF microwave circuit component design f wireless system[M]. New Yk: John Wiley & Sons Inc, 2002: 16.

[5] Davulcu M, Caliskan C, Kalyoncu I. 7-bit SiGe-BiCMOS step attenuator for X-band phased-array RADAR applications[J]. IEEE Microwave and Wireless Components, 26, 598-600(2016).

[6] [6] Barov A A, Kondratenko A V. GaAs MMIC digital phase shifter attenuat f spacebased APAR[C]22nd International Crimean Conference Microwave & Telecommunication Technology. 2012: 9192.

[7] Ku B H, Hong S C. 6-bit CMOS digital attenuator with low phase variations for X-band phased-array systems[J]. IEEE Trans Microwave Theory and Techniques, 58, 1651-1663(2010).

[8] [8] Zhao Jing, Zhang Bo, Yang Xiaofeng. A 2530 GHz 6bit digital attenuat with high accuracy low ion loss[C]IEEE MTTS International Wireless Symposium(IWS). 2016: 13.

[10] [10] Shin D H, Jeong J C, Moon S M, et al. Compact Kub GaAs multifunction chip f SATCOM[C]Phased Arrays. Radar Conference. 2015: 449452.