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Journal of the Chinese Ceramic Society, Volume. 49, Issue 12, 2644(2021)

Effects of Scratch Speed and Crystal Orientation on Scratch Characteristics of 6H-SiC Wafer

ZHANG Yinxia, HUANG Pengju, and GAO Wei*
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    ZHANG Yinxia, HUANG Pengju, GAO Wei. Effects of Scratch Speed and Crystal Orientation on Scratch Characteristics of 6H-SiC Wafer[J]. Journal of the Chinese Ceramic Society, 2021, 49(12): 2644

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    Paper Information

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    Received: Jan. 29, 2021

    Accepted: --

    Published Online: Feb. 11, 2022

    The Author Email: Wei GAO (gaowei@zzu.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology