Acta Optica Sinica, Volume. 30, Issue 10, 2849(2010)
Wave-Front Quality Analysis of Three-Dimension Pinhole Vector Diffractional in Extreme Ultraviolet Region
[1] [1] K. Otaki, Y. Zhua, M. Ishij et al.. Rigorous wave front analysis of the visible-light point diffraction interferometer for EUVL[C]. SPIE, 2004, 5193: 182~190
[2] [2] K. Otaki, K. Ota, I. Nishiyama et al.. Development of the point diffraction interferometer for extreme ultraviolet lithography: design, fabrication, and eveluation[J]. J. Vac. Sci. Technol. B., 2002, 20(6): 2449~2458
[3] [3] H. Medecki, E. Tejnil, K. A. Goldberg et al.. Phase-shifting point diffraction interferometer[J]. Opt. Lett., 1996, 21(19): 1526~1528
[4] [4] Sang Hun Lee, Patrick Naullear, Kenneth A. Goldberg et al.. Phase-shifting point-diffraction interferometry at 193 nm[J]. Appl. Opt., 2000, 39(31): 5768~5772
[5] [5] J. P. Spallas, R. E. Hostetler, G. E. Sommargren et al.. Fabrication of extreme-ultraviolet point-diffraction interferometer aperture arrays[J]. Appl. Opt., 1995, 34(28): 6393~6398
[6] [6] Lü Naiguang. Fourier Optics[M]. Beijing: China Machine Press, 2006, 65~102
[8] [8] Deng Xiaojiu, Li Huailong, Liu Caixia et al.. A comparative study of vectorial diffraction theories and the validity of scalar approximation[J]. Chinese J. Quant. Electron., 2007, 24(5): 543~547
[9] [9] Ge Debiao, Yan Yubo. Finite-Difference Time-Domain Method for Electromagnetic Wave[M]. Xi′an: Xidian University Press, 2005, 11~34
[10] [10] J. W. Goodman. Introduction to Fourier Optics[M]. New York: McGraw-Hill Companies, 1988, 32~62
[11] [11] Born M, Wolf E. Principles of Optics[M]. Yang Jiasun Transl. Beijing: Electroics Industry Press, 2005, 342~347
[12] [12] Daniel Malacara. Optical Shop Testing (Third Edited)[M]. New York: John Wiley & Sons, 2007, 498~546
[13] [13] Hui Mei, Niu Hanben. A method of wavefront data fitting using Zernike polynomials[J]. Acta Photonica Sinica, 1999, 28(12): 1113~1116
[15] [15] Daniel Malacara, J. Martin Carpiovaladéz, J. Javier Sánchezmondragón. Wavefront fitting with discrete orthogonal polynomials in a unit radius circle[J]. Opt. Engng., 1990, 29(6): 672~675
[18] [18] Yoshiyuki Sekine, Akiyoshi Suzuki, Masanobu Hasegawa. Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers[J]. J. Vac. Sci. Technol. B., 2004, 22(1): 104~108
Get Citation
Copy Citation Text
Lu Zengxiong, Jin Chunshui, Zhang Lichao, Wang Liping. Wave-Front Quality Analysis of Three-Dimension Pinhole Vector Diffractional in Extreme Ultraviolet Region[J]. Acta Optica Sinica, 2010, 30(10): 2849
Category: Diffraction and Gratings
Received: Dec. 15, 2009
Accepted: --
Published Online: Oct. 24, 2012
The Author Email: Zengxiong Lu (lzengx103@163.com)