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Acta Optica Sinica, Volume. 30, Issue 10, 2849(2010)

Wave-Front Quality Analysis of Three-Dimension Pinhole Vector Diffractional in Extreme Ultraviolet Region

Lu Zengxiong1,2、*, Jin Chunshui1, Zhang Lichao1, and Wang Liping1
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    Lu Zengxiong, Jin Chunshui, Zhang Lichao, Wang Liping. Wave-Front Quality Analysis of Three-Dimension Pinhole Vector Diffractional in Extreme Ultraviolet Region[J]. Acta Optica Sinica, 2010, 30(10): 2849

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    Paper Information

    Category: Diffraction and Gratings

    Received: Dec. 15, 2009

    Accepted: --

    Published Online: Oct. 24, 2012

    The Author Email: Zengxiong Lu (lzengx103@163.com)

    DOI:10.3788/aos20103010.2849

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology