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International Journal of Extreme Manufacturing, Volume. 5, Issue 3, 35008(2023)

Acousto-optic scanning spatial-switching multiphoton lithography

Binzhang Jiao1... Fayu Chen1, Yuncheng Liu1, Xuhao Fan1, Shaoqun Zeng1,2, Qi Dong1, Leimin Deng1,2, Hui Gao1,2,*, and and Wei Xiong12 |Show fewer author(s)
Author Affiliations
  • 1Wuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, Hubei 430074, People’s Republic of China
  • 2Optics Valley Laboratory, Wuhan, Hubei 430074, People’s Republic of China
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    Binzhang Jiao, Fayu Chen, Yuncheng Liu, Xuhao Fan, Shaoqun Zeng, Qi Dong, Leimin Deng, Hui Gao, and Wei Xiong. Acousto-optic scanning spatial-switching multiphoton lithography[J]. International Journal of Extreme Manufacturing, 2023, 5(3): 35008

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    Paper Information

    Received: Apr. 13, 2023

    Accepted: --

    Published Online: Jul. 26, 2024

    The Author Email: Gao Hui (gaohui_wnlo@hust.edu.cn)

    DOI:10.1088/2631-7990/ace0a7

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology