International Journal of Extreme Manufacturing, Volume. 5, Issue 3, 35008(2023)
Acousto-optic scanning spatial-switching multiphoton lithography
Nano-3D printing has obtained widespread attention owing to its capacity to manufacture end-use components with nano-scale features in recent years. Multiphoton lithography (MPL) is one of the most promising 3D nanomanufacturing technologies, which has been widely used in manufacturing micro-optics, photonic crystals, microfluidics, meta-surface, and mechanical metamaterials. Despite of tremendous potential of MPL in laboratorial and industrial applications, simultaneous achievement of high throughput, high accuracy, high design freedom, and a broad range of material structuring capabilities remains a long-pending challenge. To address the issue, we propose an acousto-optic scanning with spatial-switching multispots (AOSS) method. Inertia-free acousto-optic scanning and nonlinear swept techniques have been developed for achieving ultrahigh-speed and aberration-free scanning. Moreover, a spatial optical switch concept has been implemented to significantly boost the lithography throughput while maintaining high resolution and high design freedom. An eight-foci AOSS .1 system has demonstrated a record-high 3D printing rate of 7.6 × 107 voxel s , which is nearly one order of magnitude higher than earlier scanning MPL, exhibiting its promise for future scalable 3D nanomanufacturing.
Get Citation
Copy Citation Text
Binzhang Jiao, Fayu Chen, Yuncheng Liu, Xuhao Fan, Shaoqun Zeng, Qi Dong, Leimin Deng, Hui Gao, and Wei Xiong. Acousto-optic scanning spatial-switching multiphoton lithography[J]. International Journal of Extreme Manufacturing, 2023, 5(3): 35008
Received: Apr. 13, 2023
Accepted: --
Published Online: Jul. 26, 2024
The Author Email: Gao Hui (gaohui_wnlo@hust.edu.cn)