International Journal of Extreme Manufacturing, Volume. 5, Issue 3, 35008(2023)

Acousto-optic scanning spatial-switching multiphoton lithography

Binzhang Jiao1... Fayu Chen1, Yuncheng Liu1, Xuhao Fan1, Shaoqun Zeng1,2, Qi Dong1, Leimin Deng1,2, Hui Gao1,2,*, and and Wei Xiong12 |Show fewer author(s)
Author Affiliations
  • 1Wuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, Hubei 430074, People’s Republic of China
  • 2Optics Valley Laboratory, Wuhan, Hubei 430074, People’s Republic of China
  • show less

    Nano-3D printing has obtained widespread attention owing to its capacity to manufacture end-use components with nano-scale features in recent years. Multiphoton lithography (MPL) is one of the most promising 3D nanomanufacturing technologies, which has been widely used in manufacturing micro-optics, photonic crystals, microfluidics, meta-surface, and mechanical metamaterials. Despite of tremendous potential of MPL in laboratorial and industrial applications, simultaneous achievement of high throughput, high accuracy, high design freedom, and a broad range of material structuring capabilities remains a long-pending challenge. To address the issue, we propose an acousto-optic scanning with spatial-switching multispots (AOSS) method. Inertia-free acousto-optic scanning and nonlinear swept techniques have been developed for achieving ultrahigh-speed and aberration-free scanning. Moreover, a spatial optical switch concept has been implemented to significantly boost the lithography throughput while maintaining high resolution and high design freedom. An eight-foci AOSS .1 system has demonstrated a record-high 3D printing rate of 7.6 × 107 voxel s , which is nearly one order of magnitude higher than earlier scanning MPL, exhibiting its promise for future scalable 3D nanomanufacturing.

    Tools

    Get Citation

    Copy Citation Text

    Binzhang Jiao, Fayu Chen, Yuncheng Liu, Xuhao Fan, Shaoqun Zeng, Qi Dong, Leimin Deng, Hui Gao, and Wei Xiong. Acousto-optic scanning spatial-switching multiphoton lithography[J]. International Journal of Extreme Manufacturing, 2023, 5(3): 35008

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Apr. 13, 2023

    Accepted: --

    Published Online: Jul. 26, 2024

    The Author Email: Gao Hui (gaohui_wnlo@hust.edu.cn)

    DOI:10.1088/2631-7990/ace0a7

    Topics