International Journal of Extreme Manufacturing, Volume. 5, Issue 1, 15004(2023)
Two-dimensional laser-induced periodic surface structures formed on crystalline silicon by GHz burst mode femtosecond laser pulses
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Two-dimensional laser-induced periodic surface structures formed on crystalline silicon by GHz burst mode femtosecond laser pulses[J]. International Journal of Extreme Manufacturing, 2023, 5(1): 15004
Received: Apr. 21, 2022
Accepted: --
Published Online: Jul. 26, 2024
The Author Email: (ksugioka@riken.jp)