Acta Optica Sinica, Volume. 34, Issue 10, 1031002(2014)
Properties of Iridium Thin Films Fabricated by Atomic Layer Deposition
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Ye Zhijie, Shen Weidong, Zhang Yueguang, Zhang Xing, Yuan Wenjia, Li Yanghui, Liu Xu. Properties of Iridium Thin Films Fabricated by Atomic Layer Deposition[J]. Acta Optica Sinica, 2014, 34(10): 1031002
Paper Information
Category: Thin Films
Received: May. 12, 2014
Accepted: --
Published Online: Sep. 9, 2014
The Author Email: Zhijie Ye (yezhijie006@163.com)
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