Optics and Precision Engineering, Volume. 30, Issue 16, 1943(2022)

Development of micro assembly system for friction resistance sensor manufactured based on MEMS

Liwei XUE1... Xiong WANG2,*, Yudie JIA1, Hao SHEN1 and Liguo CHEN1,* |Show fewer author(s)
Author Affiliations
  • 1School of Mechanical and Electrical Engineering, Soochow University, Suzhou25000, China
  • 2Hypervelocity Aerodynamics Institute, China Aerodynamics Research and Development Center, Mianyang61000,China
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    References(13)

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    Liwei XUE, Xiong WANG, Yudie JIA, Hao SHEN, Liguo CHEN. Development of micro assembly system for friction resistance sensor manufactured based on MEMS[J]. Optics and Precision Engineering, 2022, 30(16): 1943

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Jun. 8, 2022

    Accepted: --

    Published Online: Sep. 22, 2022

    The Author Email: WANG Xiong (wangxiong0081@sina.com), CHEN Liguo (wangxiong0081@sina.com)

    DOI:10.37188/OPE.20223016.1943

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