Optics and Precision Engineering, Volume. 30, Issue 16, 1943(2022)
Development of micro assembly system for friction resistance sensor manufactured based on MEMS
Figures & Tables(17)
Fig. 3. Schematic diagram of dispensing position of MEMS friction sensor
Fig. 8. Structure and control principle precision positioning platform
Table 1. Result of precision positioning platform and camera calibration
View tableView in ArticleTable 1. Result of precision positioning platform and camera calibration
Camera a b c Upper -0.003 026 74 -0.000 010 68 141.224 -1.742 96E-5 0.003 023 37 150.560 Lower -0.002 332 56 -7.686 08E-6 41.347 7 -1.033 96E-6 -0.002 325 13 167.675
Table 2. Precision of micro vision calibration
View tableView in ArticleTable 2. Precision of micro vision calibration
Serial number m1 n1 m2 n2 d Δd 1 2 723.686 1 206.195 3 322.569 1 210.297 1 107.959 2.041 2 1 595.653 393.859 2 194.536 385.654 1 108.037 1.963 3 2 781.113 1 534.411 3 379.996 1 534.411 1 107.933 2.067 4 739.437 1 298.591 1 338.324 1 291.483 1 108.019 1.981 5 2 876.627 834.144 3 475.518 834.146 1 107.948 2.052 6 2 496.196 1 673.015 3 095.086 1 679.897 1 108.019 1.981 7 1 789.814 1 394.349 2 388.704 1 394.351 1 107.947 2.053 8 1 389.615 497.413 1 988.502 490.634 1 108.012 1.988 9 698.197 973.582 1 297.082 976.619 1 107.951 2.049 10 498.095 1 387.287 1 096.978 1 394.021 1 108.004 1.996
Table 3. Concentricity difference measurement results
View tableView in ArticleTable 3. Concentricity difference measurement results
Serial number Center distance difference/μm 1 3.97 2 6.21 3 2.83 4 5.03 5 7.92 6 3.41
Table 4. Height difference measurement results
View tableView in ArticleTable 4. Height difference measurement results
Item Segment difference （min） Segment difference （mean） Segment difference （max） 1 0.015 0.018 0.020 2 0.016 0.018 0.020 3 0.015 0.018 0.020 4 0.015 0.017 0.019 5 0.016 0.018 0.020 6 0.015 0.018 0.020 7 0.015 0.017 0.019 8 0.015 0.018 0.020 9 0.016 0.017 0.019 10 0.016 0.018 0.020 Mean 0.015 197 0.017 648 0.023 52 σ 0.000 410 0.000 401 0.000 508
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Liwei XUE, Xiong WANG, Yudie JIA, Hao SHEN, Liguo CHEN. Development of micro assembly system for friction resistance sensor manufactured based on MEMS[J]. Optics and Precision Engineering, 2022, 30(16): 1943
Paper Information
Category: Micro/Nano Technology and Fine Mechanics
Received: Jun. 8, 2022
Accepted: --
Published Online: Sep. 22, 2022
The Author Email: WANG Xiong (wangxiong0081@sina.com), CHEN Liguo (wangxiong0081@sina.com)
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