Researching | Research on Auto-split GaN-based Vertical Structure LED

Acta Photonica Sinica, Volume. 49, Issue 12, 27(2020)

Research on Auto-split GaN-based Vertical Structure LED

Xu-liang SU... Can WANG, Lei-ying YING, Huan XU, Rong-bin XU, Yang MEI, Zhi-wei ZHENG, Hao LONG and Bao-ping ZHANG |Show fewer author(s)

Author Affiliations

Department of Electronic Engineering， Xiamen University，Xiamen， Fujian361005， China

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References (20)

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Figures & Tables(7)

Fig. 1. Process flow of GaN-based auto-split vertical structure LED

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Fig. 2. Morphology of mushroom copper substrute

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Fig. 3. Surface morphology after polishing

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Fig. 4. Performance comparison of LED -Ⅰ and LED -Ⅱ

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Fig. 5. Performance comparison of LED-Ⅱ and LED-Ⅲ

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Fig. 6. Performance comparison of LED-Ⅲ and LED-Ⅳ

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Table 1. Four different LED structures
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Table 1. Four different LED structures
Device number Device size/μm² Electrode shape Device structure
LED-Ⅰ 300×300 Disc shape Regular⁃LED
LED-Ⅱ 300×300 Disc shape ASV⁃LED
LED-Ⅲ 500×500 Disc shape ASV⁃LED
LED-Ⅳ 500×500 Ring shape ASV⁃LED

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Xu-liang SU, Can WANG, Lei-ying YING, Huan XU, Rong-bin XU, Yang MEI, Zhi-wei ZHENG, Hao LONG, Bao-ping ZHANG. Research on Auto-split GaN-based Vertical Structure LED[J]. Acta Photonica Sinica, 2020, 49(12): 27

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Paper Information

Category: Optical Devices

Received: --

Accepted: --

Published Online: Mar. 11, 2021

The Author Email:

DOI:10.3788/gzxb20204912.1223004

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology