Journal of Inorganic Materials, Volume. 38, Issue 12, 1413(2023)

Uniform Growth of Two-inch MPCVD Optical Grade Diamond Film

Siyi CHAN1... Juping TU1, Ke HUANG1, Siwu SHAO1, Zhiliang YANG1, Peng LIU1, Jinlong LIU1,*, Liangxian CHEN1, Junjun WEI1,2, Kang AN3, Yuting ZHENG1,2 and Chengming LI1,* |Show fewer author(s)
Author Affiliations
  • 11. Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China
  • 22. Shunde Innovation School, University of Science and Technology Beijing, Foshan 528399, China
  • 33. School of Mechanical and Materials Engineering, North China University of Technology, Beijing 100144, China
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    References(21)

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    [5] J L LIU, K AN, L X CHEN et al. Research progress of freestanding CVD diamond films. Surface Technology, 1(2018).

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    [14] Y F LI, W Z TANG, L JIANG et al. Large area high quality diamond films deposition by 915 MHz high power MPCVD reactor. Journal of Synthetic Crystals, 1262(2019).

    [15] Y F LI, X M AN, X C LIU et al. A 915MHz/75kW cylindrical cavity type microwave plasma chemical vapor deposition reactor with a ladder-shaped circumferential antenna developed for growing large area diamond films. Diamond and Related Materials(2017).

    [16] E M A FUENTES-FERNANDEZ, J J ALCANTAR-PENA, G LEE et al. Synthesis and characterization of microcrystalline diamond to ultrananocrystalline diamond films via hot filament chemical vapor deposition for scaling to large area applications. Thin Solid Films(2016).

    [17] J WENG, F LIU, L W XIONG et al. Deposition of large area uniform diamond films by microwave plasma CVD. Vacuum(2018).

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    [19] S ZHANG, K AN, Z L YANG et al. 100 mm in diameter diamond films with high uniformity prepared by novel deposition mode in MPCVD system. Vacuum and Cryogenics, 549(2022).

    [20] B WANG, J WENG, Z T WANG et al. Investigation on the influence of the gas flow mode around substrate on the deposition of diamond films in an overmoded MPCVD reactor chamber. Vacuum(2020).

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    Siyi CHAN, Juping TU, Ke HUANG, Siwu SHAO, Zhiliang YANG, Peng LIU, Jinlong LIU, Liangxian CHEN, Junjun WEI, Kang AN, Yuting ZHENG, Chengming LI. Uniform Growth of Two-inch MPCVD Optical Grade Diamond Film[J]. Journal of Inorganic Materials, 2023, 38(12): 1413

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    Paper Information

    Category:

    Received: Apr. 24, 2023

    Accepted: --

    Published Online: Mar. 6, 2024

    The Author Email: LIU Jinlong (liujinlong@ustb.edu.cn), LI Chengming (chengmli@mater.ustb.edu.cn)

    DOI:10.15541/jim20230202

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