<trans-title xml:lang="en">Uniform Growth of Two-inch MPCVD Optical Grade Diamond Film</trans-title>

Siyi CHAN; Juping TU; Ke HUANG; Siwu SHAO; Zhiliang YANG; Peng LIU; Jinlong LIU; Liangxian CHEN; Junjun WEI; Kang AN; Yuting ZHENG; Chengming LI

doi:10.15541/jim20230202

Journal of Inorganic Materials, Volume. 38, Issue 12, 1413(2023)

Uniform Growth of Two-inch MPCVD Optical Grade Diamond Film

Siyi CHAN1... Juping TU1, Ke HUANG1, Siwu SHAO1, Zhiliang YANG1, Peng LIU1, Jinlong LIU1,*, Liangxian CHEN1, Junjun WEI1,2, Kang AN3, Yuting ZHENG1,2 and Chengming LI1,* |Show fewer author(s)

Author Affiliations

¹1. Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China

²2. Shunde Innovation School, University of Science and Technology Beijing, Foshan 528399, China

³3. School of Mechanical and Materials Engineering, North China University of Technology, Beijing 100144, China

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Figures & Tables(10)

1. Schematic diagram of substrate placement for different deposition platform heights

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2. Electric field simulations above the substrate for different deposition platform heights

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3. Electric field inhomogeneity (a) and electric field intensity distributions (b) above the substrate at different deposition platform heights

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4. Shape diagrams of the plasma spheres at different deposition platform heights

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5. Optical emission spectra (a), relative C₂, H_α, H_β, CH emission intensities and variations in I_C2/I_Hα, I_CH/I_Hα, I_Hβ/I_Hα ratio (b) at different deposition platform heights

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6. Uniformity of temperature distributions at different deposition platform heights

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7. Photographs of deposited state of the sample (a), polished state on both sides (b), and thickness distribution of the deposited state (c)

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8. XRD pattern (a) and Raman spectra (b) of the diamond films

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9. UV-Vis transmission spectra (a) and IR transmission spectra (b) of the diamond film

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Table 1. Experimental parameters
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Table 1. Experimental parameters
Nucleation Growth
Power/kW Pressure/kPa Gas: CH₄/H₂ Time/min Temperature/℃ Power/kW Pressure/kPa Gas: CH₄/O₂/H₂ Temperature/℃ Height/mm
4.7 21 35/500 40 880 4.7-4.9 21-22 25/5/500 870-880 2

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Siyi CHAN, Juping TU, Ke HUANG, Siwu SHAO, Zhiliang YANG, Peng LIU, Jinlong LIU, Liangxian CHEN, Junjun WEI, Kang AN, Yuting ZHENG, Chengming LI. Uniform Growth of Two-inch MPCVD Optical Grade Diamond Film[J]. Journal of Inorganic Materials, 2023, 38(12): 1413

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