Optics and Precision Engineering, Volume. 24, Issue 7, 1557(2016)

Surface modification of 2 m RB-SiC substrate by magnetron sputtering

LIU Zhen... GAO Jin-song, LIU Hai, WANG Xiao-yi and WANG Tong-tong |Show fewer author(s)
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    References(17)

    [1] [1] STEVE J.SiC coatings on RB SiC mirrors for ultra-smooth surfaces [J]. SPIE, 1993, 2018(11): 237-247.

    [2] [2] LEE H B, SUK J Y, BAE J I. Trade study of all-SiC lightweight primary mirror and metering structures for spaceborne telescopes [J]. SPIE, 2015, 9574: 95740D-95740D-12.

    [4] [4] SHEN ZH F, GAO J S, WANG X Y, et al.. Improvement of technological process for surface modification of RB-SiC mirror[J]. Opt. Precision Eng., 2009, 17(15): 969-974.(in Chinese)

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    [10] [10] YVES T, JACQUES B, DOMINIQUE P, et al.. The 3, 5 m all SiC telescope for SPICA [J]. SPIE, 2004, 5487: 1001-1012.

    [11] [11] REDDING D C, FEINBERG L, POSTMAN M, et al.. Beyond JWST: performance requirements for a future large UVOIR space telescope [J]. SPIE, 2014, 9143: 914312-1-10.

    [13] [13] ZHANG G, ZHAO R CH, ZHAO W X. Study on fabrication technology of reaction bonded silicon carbide mirror blank for space [J]. Chi. J. Space Sci., 2011, 31(3): 401-405.(in Chinese)

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    CLP Journals

    [1] ZHAO Yang-yong, LIU Wei-guo, XI Ying-xue. Surface Planarization Process of RB-SiC Based on Magnetron Sputtering and ICP Etching[J]. Acta Photonica Sinica, 2018, 47(3): 324001

    [2] WEI Lei, ZHANG Lei, LI Zong-xuan, MA Dong-mei. Optimization Design and Test for Large Aspect Ratio Rectangular SiC Space Mirror[J]. Acta Photonica Sinica, 2017, 46(3): 322003

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    LIU Zhen, GAO Jin-song, LIU Hai, WANG Xiao-yi, WANG Tong-tong. Surface modification of 2 m RB-SiC substrate by magnetron sputtering[J]. Optics and Precision Engineering, 2016, 24(7): 1557

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    Paper Information

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    Received: Dec. 11, 2015

    Accepted: --

    Published Online: Aug. 29, 2016

    The Author Email:

    DOI:10.3788/ope.20162407.1557

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