Optics and Precision Engineering, Volume. 24, Issue 7, 1557(2016)
Surface modification of 2 m RB-SiC substrate by magnetron sputtering
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
LIU Zhen, GAO Jin-song, LIU Hai, WANG Xiao-yi, WANG Tong-tong. Surface modification of 2 m RB-SiC substrate by magnetron sputtering[J]. Optics and Precision Engineering, 2016, 24(7): 1557
Paper Information
Category:
Received: Dec. 11, 2015
Accepted: --
Published Online: Aug. 29, 2016
The Author Email:
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20