Fabrication and Research of FBAR Based on Doped Piezoelectric Film

LAN Weihao; XU Yang; ZHANG Yongchuan; JIANG Pingying; SI Meiju; LIU Ya; LU Dandan; HE Xiliang

Journal of Synthetic Crystals, Volume. 49, Issue 6, 1040(2020)

LAN Weihao*... XU Yang, ZHANG Yongchuan, JIANG Pingying, SI Meiju, LIU Ya, LU Dandan and HE Xiliang |Show fewer author(s)

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[2] [2] Mortet V, Vasin A, Jouan P Y, et al. Aluminium nitride films deposition by reactive triode sputtering for surface acoustic wave device applications［J］.Surface & Coatings Technology, 2003,176(1): 88-92.

[4] [4] Akiyama M, Kamohara T, Kano K, et al. Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering［J］.Advanced Materials,2009,21(5): 593-596.

[5] [5] Moreira M, Bjurstrm J, Katardjev I, et al. Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications［J］.Vacuum,2011,86(1): 23-26.

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LAN Weihao, XU Yang, ZHANG Yongchuan, JIANG Pingying, SI Meiju, LIU Ya, LU Dandan, HE Xiliang. Fabrication and Research of FBAR Based on Doped Piezoelectric Film[J]. Journal of Synthetic Crystals, 2020, 49(6): 1040

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