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Journal of Synthetic Crystals, Volume. 49, Issue 6, 1040(2020)

Fabrication and Research of FBAR Based on Doped Piezoelectric Film

LAN Weihao*... XU Yang, ZHANG Yongchuan, JIANG Pingying, SI Meiju, LIU Ya, LU Dandan and HE Xiliang |Show fewer author(s)
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    LAN Weihao, XU Yang, ZHANG Yongchuan, JIANG Pingying, SI Meiju, LIU Ya, LU Dandan, HE Xiliang. Fabrication and Research of FBAR Based on Doped Piezoelectric Film[J]. Journal of Synthetic Crystals, 2020, 49(6): 1040

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    Received: --

    Accepted: --

    Published Online: Aug. 7, 2020

    The Author Email: Weihao LAN (294332676guge@gmail.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology