Journal of Applied Optics, Volume. 43, Issue 1, 124(2022)

Preparation of large-area grating structure by vibration-assisted nanoimprint

Baoyu SUN... Jichen XU, Yan GU*, Jieqiong LIN and Jie LI |Show fewer author(s)
Author Affiliations
  • College of Mechanical Engineering, Changchun University of Technology, Changchun 130012, China
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    References(15)

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    [12] S CHEN, Y GU, J LIN, et al. Study on vibration-assisted thermal nanoimprint lithography. Applied Nanoscience, 10, 3315-3324(2020).

    [13] Y GU, S CHEN, J LIN, et al. High-quality efficient anti-reflection nanopillar structures layer prepared by a new type vibration-assisted UV nanoimprint lithography. Journal of Manufacturing Processes, 61, 461-472(2021).

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    Baoyu SUN, Jichen XU, Yan GU, Jieqiong LIN, Jie LI. Preparation of large-area grating structure by vibration-assisted nanoimprint[J]. Journal of Applied Optics, 2022, 43(1): 124

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    Paper Information

    Category: OPTICAL ELEMENT AND FABRICATION

    Received: May. 21, 2021

    Accepted: --

    Published Online: Mar. 7, 2022

    The Author Email: GU Yan (guyan@ccut.edu.cn)

    DOI:10.5768/JAO202243.0105001

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