Fig. 1. Schematic diagram of optical setup of grating structure in FDTD solutions

Fig. 2. Variation curves of absorptivity with wavelengths for different depth-to-width ratio of grating structure

Fig. 3. Variation curves of absorptivity with wavelengths for different grating structure period

Fig. 4. Mathematical model of vibration-assisted nanoimprint mechanism

Fig. 5. Variation curves of filling rate with vibration frequency

Fig. 6. Variation curve of filling rate with vibration amplitude

Fig. 7. Schematic diagram of preparation process of vibration-assisted nanoimprint

Fig. 8. ZYGO surface topography diagram

Fig. 9. SEM detection diagram of grating structure

Fig. 10. Average height and width of grating structure obtained by multi-point observation