Infrared and Laser Engineering, Volume. 50, Issue 11, 20210425(2021)

Optical manipulation of vertical cavity and its applications (Invited)

Anjin Liu1...2,*, Jing Zhang1,2 and Shaoyu Zhao3 |Show fewer author(s)
Author Affiliations
  • 1State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Information Science Academy of China Electronics Technology Group Corporation, Beijing 100086, China
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    Figures & Tables(5)
    (a) VCSEL with a oxide aperture[13]; (b) Introducing phase shift mesa and selective Fermi level pinning interface in the laser cavity of VCSEL[20]; (c) Upper DBR of VCSEL introduces single defect photonic crystal microstructure[22-25]; (d) An anti-phase layer is introduced on the upper DBR surface of VCSEL[28-30]; (e) Vertical cavity with a diffraction grating[35]; (f) Vertical cavity with a metal layer[36-38]
    (a) Vertical cavities with subwavelength gratings to realize a monolithic multi-wavelength filter array[39]; (b) Monolithic multi-wavelength filter array with different cavity lengths by 3D nano imprint technology[40]
    [in Chinese]
    (a) Schematic of HCG-VCSEL[53]; (b) Schematic of HCG-VCSEL with beam shaping and far field profiles[57]; (c) Schematic of Si-based HCG-VCSEL (SOI-based HCG for reflector and coupler)[60]; (d) Schematic of polariton laser[64]
    (a) Schematic of filter with double one-dimensional HCGs[76]; (b) Schematic of filter with cross-stacked double one-dimensional HCGs[77]
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    Anjin Liu, Jing Zhang, Shaoyu Zhao. Optical manipulation of vertical cavity and its applications (Invited)[J]. Infrared and Laser Engineering, 2021, 50(11): 20210425

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    Paper Information

    Category: Special issue-Advanced technology of microcavity photonics materials and devices

    Received: Aug. 10, 2021

    Accepted: --

    Published Online: Dec. 7, 2021

    The Author Email: Liu Anjin (liuanjin@semi.ac.cn)

    DOI:10.3788/IRLA20210425

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