Journal of Advanced Dielectrics, Volume. 14, Issue 6, 2340011(2024)
Optimizing deposition regimes to fabricate VO2/TiO2/c-Al2O3 thin films for active metasurfaces
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M. E. Kutepov, V. E. Kaydashev, D. V. Stryukov, A. S. Konstantinov, A. S. Mikheykin, A. V. Nikolskiy, A. T. Kozakov, A. D. Morozov, M. A. Kashchenko, G. V. Alymov, E. M. Kaidashev. Optimizing deposition regimes to fabricate VO2/TiO2/c-Al2O3 thin films for active metasurfaces[J]. Journal of Advanced Dielectrics, 2024, 14(6): 2340011
Category: Research Articles
Received: Sep. 29, 2023
Accepted: Dec. 21, 2023
Published Online: Jan. 14, 2025
The Author Email: Kutepov M. E. (kutepov.max@yandex.ru)