Optics and Precision Engineering, Volume. 31, Issue 17, 2546(2023)

Calibration of piezoelectric three-dimensional force sensor considering angle deviation

Jun ZHANG*... Yuhe WANG, Zongjin REN, Wenju SUN and Jiale CAI |Show fewer author(s)
Author Affiliations
  • College of Mechanical Engineering, Dalian University of Technology, Dalian116024, China
  • show less
    References(20)

    [1] [1] 王云灏, 孙铭会, 辛毅, 等. 基于压电薄膜传感器的机器人触觉识别系统[J]. 浙江大学学报(工学版), 2022(4): 702-710.WANGY H, SUNM H, XINY, et al. Robot tactile recognition system based on piezoelectric film sensor[J]. Journal of Zhejiang University (Engineering Science), 2022(4): 702-710.(in Chinese)

    [2] [2] 于昌新, 何彦霖, 何超江, 等. 用于微创手术探针的光纤力传感器设计[J]. 光学 精密工程, 2022, 30(20):2421-2429. doi: 10.37188/OPE.20223020.2421YUCH X, HEY L, HECH J, et al. Design of fiber force sensors for surgical probes[J]. Opt. Precision Eng., 2022, 30(20): 2421-2429. (in Chinese). doi: 10.37188/OPE.20223020.2421

    [3] [3] 丁旭, 冯传奇, 薛文鹏, 等. 航空发动机全机推力试车台测力方法与校准技术[J]. 航空动力学报, 2023, 38(1): 144-150. doi: 10.13224/j.cnki.jasp.20210362DINGX, FENGCH Q, XUEW P, et al. Force measurement method and calibration technology of aeroengine whole thrust test bed[J]. Journal of Aerospace Power, 2023, 38(1): 144-150.(in Chinese). doi: 10.13224/j.cnki.jasp.20210362

    [4] [4] 任宗金, 李洋, 徐田国, 等. 组合支撑方式下气动多维力多点测量研究[J]. 中国机械工程, 2022, 33(2): 170-175, 186. doi: 10.3969/j.issn.1004-132X.2022.02.006RENZ J, LIY, XUT G, et al. Research on multi-point measurement of pneumatic multi-dimensional forces under combined support mode[J]. China Mechanical Engineering, 2022, 33(2): 170-175, 186.(in Chinese). doi: 10.3969/j.issn.1004-132X.2022.02.006

    [5] [5] 张军, 徐成帅, 任宗金, 等. 羽流力/力矩测量系统在线标定研究[J]. 传感器与微系统, 2017, 36(1): 13-15, 19. doi: 10.13873/J.1000-9787(2017)01-0013-03ZHANGJ, XUCH SH, RENZ J, et al. Research on online calibration of plume force/torque measuring system[J]. Transducer and Microsystem Technologies, 2017, 36(1): 13-15, 19.(in Chinese). doi: 10.13873/J.1000-9787(2017)01-0013-03

    [6] [6] 刘俊, 徐军领, 李敏, 等. 垫圈式压电六维力传感器静态灵敏度解析[J]. 光学 精密工程, 2019, 27(4): 901-910. doi: 10.3788/ope.20192704.0901LIUJ, XUJ L, LIM, et al. Static sensitivity analysis of washer-type piezoelectric six-axis force sensor[J]. Opt. Precision Eng., 2019, 27(4): 901-910.(in Chinese). doi: 10.3788/ope.20192704.0901

    [7] L QIN, C JIANG, J LIU et al. Design and calibration of a novel piezoelectric six-axis force/torque sensor, 8321, 118-126(2011).

    [8] [8] 孙世政, 于竞童, 韩宇, 等. 基于SSA-ELM的双层十字梁结构光纤布拉格光栅传感器三维力解耦[J]. 光学 精密工程, 2022, 30(3): 274-285. doi: 10.37188/OPE.2021.0549SUNSH ZH, YUJ T, HANY, et al. FBG sensor of double-layer cross beam structure based on SSA-ELM three-dimensional force decoupling[J]. Opt. Precision Eng., 2022, 30(3): 274-285.(in Chinese). doi: 10.37188/OPE.2021.0549

    [9] Y Q YU, R SHI, Y J LOU. Bias estimation and gravity compensation for wrist-mounted force/torque sensor. IEEE Sensors Journal, 22, 17625-17634(2021).

    [10] [10] 李映君, 韩彬彬, 王桂从, 等. 基于径向基函数神经网络的压电式六维力传感器解耦算法[J]. 光学 精密工程, 2017, 25(5): 1266-1271. doi: 10.3788/ope.20172505.1266LIY J, HANB B, WANGG C, et al. Decoupling algorithms for piezoelectric six-dimensional force sensor based on RBF neural network[J]. Opt. Precision Eng., 2017, 25(5): 1266-1271.(in Chinese). doi: 10.3788/ope.20172505.1266

    [11] J ZHANG, Y TIAN, Z J REN et al. The calibration of force offset for rocket engine based on deep belief network. Measurement and Control, 51, 172-181(2018).

    [12] B Y WU, Z C WU, F SHEN. Research on calibration system error of 6-axis force/torque sensor integrated in humanoid robot foot, 6878-6882(2010).

    [13] [13] 付立悦, 宋爱国. 六维力传感器静态标定系统误差分析[J]. 计量学报, 2019, 40(2): 295-299. doi: 10.3969/j.issn.1000-1158.2019.02.20FUL Y, SONGA G. Error analysis of six-axis force/torque sensor’s static calibration system[J]. Acta Metrologica Sinica, 2019, 40(2): 295-299.(in Chinese). doi: 10.3969/j.issn.1000-1158.2019.02.20

    [14] [14] 范志强, 马宏昊, 沈兆武, 等. 夹心式 PVDF 压力传感器压电特性及标定装置研究[J]. 振动与冲击, 2014, 33(16): 68-71. doi: 10.13465/j.cnki.jvs.2014.16.012FANZH Q, MAH H, SHENZH W, et al. Piezoelectric property of sandwich PVDF pressure gauge and its calibration device[J]. Journal of Vibration and Shock, 2014, 33(16): 68-71.(in Chinese). doi: 10.13465/j.cnki.jvs.2014.16.012

    [15] J ZHANG, J SHAO, Z J REN et al. Research on dimension coupling of piezoelectric three-component force unit based on sensor assembly error. Advances in Mechanical Engineering, 11, 168781401984629(2019).

    [16] [16] 张军, 于婧, 任宗金, 等. 压电三向测力单元的精度提高方法研究[J]. 电子测量与仪器学报, 2021, 35(9): 164-169.ZHANGJ, YUJ, RENZ J, et al. Research on methods of improving the precision of piezoelectric force measuring unit[J]. Journal of Electronic Measurement and Instrumentation, 2021, 35(9): 164-169.(in Chinese)

    [17] [17] 张顺星, 周吴, 卢鹏, 等. 考虑横向灵敏度的三轴加速度传感器标定方法研究[J]. 仪器仪表学报, 2021, 42(4): 33-40. doi: 10.19650/j.cnki.cjsi.J2107538ZHANGSH X, ZHOUW, LUP, et al. Research on the calibration method of triaxial acceleration sensor with transverse sensitivity[J]. Chinese Journal of Scientific Instrument, 2021, 42(4): 33-40.(in Chinese). doi: 10.19650/j.cnki.cjsi.J2107538

    [18] [18] 王青, 余小光, 乔明杰, 等. 基于序列二次规划算法的定位器坐标快速标定方法[J]. 浙江大学学报(工学版), 2017, 51(2): 319-327. doi: 10.3785/j.issn.1008-973X.2017.02.013WANGQ, YUX G, QIAOM J, et al. Rapid calibration based on SQP algorithm for coordinate frame of localizers[J]. Journal of Zhejiang University (Engineering Science), 2017, 51(2): 319-327.(in Chinese). doi: 10.3785/j.issn.1008-973X.2017.02.013

    [19] [19] 李嘉, 李华聪, 王万成, 等. 燃油离心泵多目标优化设计及仿真分析[J]. 推进技术, 2021, 42(3): 666-674. doi: 10.13675/j.cnki.tjjs.200247LIJ, LIH C, WANGW CH, et al. Multi-objective optimization design and simulation for fuel centrifugal pump[J]. Journal of Propulsion Technology, 2021, 42(3): 666-674.(in Chinese). doi: 10.13675/j.cnki.tjjs.200247

    [20] [20] 崔晶, 张锦涛, 宋婷, 等. 三轴力解耦测量的高灵敏触觉传感器[J]. 光学 精密工程, 2019, 27(11): 2410-2419. doi: 10.3788/ope.20192711.2410CUIJ, ZHANGJ T, SONGT, et al. High-sensitive tactile sensor with triaxial force decoupling measurements[J]. Opt. Precision Eng., 2019, 27(11): 2410-2419.(in Chinese). doi: 10.3788/ope.20192711.2410

    Tools

    Get Citation

    Copy Citation Text

    Jun ZHANG, Yuhe WANG, Zongjin REN, Wenju SUN, Jiale CAI. Calibration of piezoelectric three-dimensional force sensor considering angle deviation[J]. Optics and Precision Engineering, 2023, 31(17): 2546

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Feb. 22, 2023

    Accepted: --

    Published Online: Oct. 9, 2023

    The Author Email: ZHANG Jun (zhangj@dlut.edu.cn)

    DOI:10.37188/OPE.20233117.2546

    Topics